Special servo motor for ultra precision semi conductor equipment FHA-8C-50-E200-C

Abstract

The Harmonic Drive FHA-8C-50-E200-CE serial harmonic transmission mechanism typically consists of three basic components:

1. Rigid wheel with internal teeth: This is a fixed gear in the transmission system, with internal teeth for power transmission.

2. Flexible wheel with external teeth: This component can undergo radial elastic deformation during operation and has external teeth that engage with the internal teeth of the rigid wheel for transmission.

3. Wave generator: Installed inside the flexible wheel, typically elliptical in shape, with an outer ring equipped with flexible rolling bearings. The wave generator, through its specific motion, enables the flexible wheel to undergo elastic deformation, thereby achieving the unique function of harmonic transmission.

These components work together to form the crucial parts of the harmonic transmission mechanism, facilitating precise and efficient power and motion transmission.

Specialties

HarmonicDrive ® Integrated AC servo actuator with specially designed flat AC servo motor

Hollow and flat structure

Absolute value encoder

SHA-SG: Compact shape with extra length

SHA-CG: For turntable use, improve the accuracy of output shaft surface vibration

1. Model name: AC servo actuator SHA series

2. Model:

SG type=20, 25, 32, 40, 45, 58, 65

HP type=25,32

CG type=20,25,32,40

3. Version symbols

4. HarmonicDrive ® Reduction ratio:

SG type=51,81101121161

HP type=11

CG type=50,80100120160

5. Type of reducer:

SG type=SHG series

HP type=HPF series

CG type=CSG series

6. Motor version symbol:

A=Models 58, 65

B=Models 25, 32, 40

C=Model 20

D=Model 45

7. Motor size:

● 08=Model 20

09=Model 25

12=Model 32

15=Model 40

16=Model 45

21=Models 58, 65

8. Brake:

● A=No brake

● B=With brake

9. Motor power supply voltage:

100=AC100V

200=AC200V

10. Encoder format:

10=symbol A format, transmission speed: 2.5Mbps, 1:1 connection

11. Encoder type and resolution:

S17b=17bit absolute encoder 131072 pulses/rotation

12. Encoder phase angle:

The phase difference A between the U-phase induced voltage of the motor and the absolute origin is 0 degrees

13 connector specifications:

● C=With standard connectors

● N=No connector

D=With special connectors

14. Optional symbols:

L=Near Origin&End Limit Sensor

Y=Cable side exit

● V=With bracket (CG type only)

● S=Output shaft 1 rotation absolute value specification (CG type only)

● No entry=standard product

SP=non-standard product