Special servo motor for ultra precision semiconductor equipment RSF series

Abstract

An output type small high torque AC servo actuator composed of RSF series HarmonicDrive and AC servo motor combination.

Specialties

HarmonicDrive ® A small AC servo actuator integrated with a specially designed servo motor

Output shape: Axis shape

1. Model name: AC servo actuator RSF series (shaft output type)

2. Models: 17, 20, 25, 32

3. Version symbol: A

4. HarmonicDrive ® Reduction ratio: 50, 100

5. Encoder type: E=incremental encoder

6. Encoder resolution: 200=2000p/rev

7. Special specifications:

● No entry=standard product

SP=non-standard product