Special servo motor for ultra precision semiconductor equipment FHA series

Abstract

The FHA-C series is an ultra flat AC servo actuator. Its characteristics are unparalleled thin and hollow hole structures, used for driving robot joints, alignment mechanisms for semiconductor LCD panel manufacturing devices, ATC drive for machine tools, and roller drive for printing related machinery.

Specialties

HarmonicDrive ® Integrated AC servo actuator with specially designed ultra flat AC servo motor

Hollow and flat structure

Incremental encoder

1. Model name: AC servo actuator FHA-C series

2. Models: 17, 25, 32, 40

3. Version symbol: C

4. HarmonicDrive ® Reduction ratio: 50, 80, 100, 120, 160

5. Encoder type and resolution: E250=incremental encoder 2500p/r

6. Version symbols (please consult our business office for details)

7. Special specifications:

● No entry=standard product

SP=non-standard product